Description
1. Applications:
It is suitable for the storage of silicon wafers and wafer boxes during the production process of semiconductor front-end monocrystalline silicon, and prevents the phenomenon of returning particles and returning fog to silicon wafers;
Suitable for storing items that need to be protected from dust pollution.
2. Product Features:
1) The humidity display range is 0.1%~99.9% RH, and the temperature display range is -40 °C~70.0 °C（Below -9.9℃, display to single digits）; 4-inch ultra-bright LED Segment displays; Display accuracy: humidity ± 3% RH; temperature ± 1 °C;
2) The cabinet and the shelves are made of 304 mirror stainless steel;
3) The surface resistance value is 106~108Ω;
4) Dust-free fan: imported special FFU fan for clean room, galvanized plate material, aluminum alloy impeller. Wind speed: 0.3-0.45m/s, noise<=55dB;
5) High-efficiency filter with double-sided mesh protection, the filtration efficiency is as high as 99.99%@0.3um;
6) Modular design: This machine adopts a unique modular design. The temperature and humidity display, control system, and dust removal system can all be replaced quickly, and the maintenance and repair are simple, which greatly improves maintenance efficiency;
7) The products passed CE, RoHS and C-Tick certificates;
Options for customer’s special demands:
1. Nitrogen saving control system;
2. Alarm system;
